CPC C01B 32/182 (2017.08) [B01J 19/18 (2013.01); B01J 19/245 (2013.01); C01B 32/05 (2017.08); C01B 32/184 (2017.08); C01B 32/186 (2017.08); C23C 16/0209 (2013.01); C23C 16/26 (2013.01); B82Y 40/00 (2013.01); C01B 2204/02 (2013.01)] | 20 Claims |
1. A method for forming graphene, said method comprising:
pretreating a surface for processing using one or more pretreating flowrates of a substrate gas scavenging gas composition, in presence of one or more pretreating temperatures, to produce a contaminant-depleted surface; and
treating said contaminant-depleted surface using one or more treating flowrates of an annealing gas composition, in presence of one or more treating temperatures, to produce an annealed surface.
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