US 11,866,322 B2
Ultrafast photonic micro-systems
Jin Wang, Hinsdale, IL (US); Donald A. Walko, Woodridge, IL (US); Pice Chen, Lemont, IL (US); Il Woong Jung, Lemont, IL (US); and Daniel Lopez, Lemont, IL (US)
Filed by UCHICAGO ARGONNE, LLC, Chicago, IL (US)
Filed on Mar. 9, 2021, as Appl. No. 17/196,710.
Claims priority of provisional application 62/987,760, filed on Mar. 10, 2020.
Prior Publication US 2021/0284526 A1, Sep. 16, 2021
Int. Cl. B81B 3/00 (2006.01); G02B 27/42 (2006.01)
CPC B81B 3/0083 (2013.01) [G02B 27/4233 (2013.01); B81B 2201/047 (2013.01)] 18 Claims
OG exemplary drawing
 
1. A microelectromechanical device for diffracting optical beams, the device comprising;
a diffractive element suspended over a channel, the diffractive element configured to receive an optical beam and diffract the optical beam based on an orientation of the diffractive element, the diffractive element comprises at least one notch is formed at an edge of the diffractive element, which is parallel to an oscillation axis of the diffractive element; and
at least one torsional actuator operatively connected to the diffractive element, the at least one torsional actuator configured to selectively adjust the orientation of the diffractive element,
wherein the diffractive element having a diffractive element resonant frequency and the at least one notch causing the diffractive element resonant frequency to be the same as the resonant frequency of the optical beam.