US 11,865,701 B2
Suction method
Masaki Hirose, Hamamatsu (JP); Katsumi Shibayama, Hamamatsu (JP); Takashi Kasahara, Hamamatsu (JP); Toshimitsu Kawai, Hamamatsu (JP); Hiroki Oyama, Hamamatsu (JP); and Yumi Kuramoto, Hamamatsu (JP)
Assigned to HAMAMATSU PHOTONICS K.K., Hamamatsu (JP)
Appl. No. 16/763,888
Filed by HAMAMATSU PHOTONICS K.K., Hamamatsu (JP)
PCT Filed Nov. 9, 2018, PCT No. PCT/JP2018/041728
§ 371(c)(1), (2) Date May 13, 2020,
PCT Pub. No. WO2019/098142, PCT Pub. Date May 23, 2019.
Claims priority of application No. 2017-221852 (JP), filed on Nov. 17, 2017.
Prior Publication US 2021/0362351 A1, Nov. 25, 2021
Int. Cl. B25J 15/06 (2006.01); B65G 49/05 (2006.01); G02B 5/28 (2006.01); G02B 5/18 (2006.01)
CPC B25J 15/065 (2013.01) [B25J 15/0616 (2013.01); B65G 49/05 (2013.01); G02B 5/1847 (2013.01); G02B 5/284 (2013.01)] 7 Claims
OG exemplary drawing
 
1. A suction method of performing suction of a Fabry-Perot interference filter including: a substrate; a laminated structure that is provided on the substrate and that includes a main surface facing a side opposite to the substrate; and a thinned portion that is located outside the laminated structure when viewed in a direction intersecting the main surface and that is recessed to a side of the substrate with respect to the main surface, by using a suction collet,
the method comprising:
a first step of arranging the suction collet so as to face the main surface;
a second step of bringing the suction collet into contact with the Fabry-Perot interference filter after the first step; and
a third step of suctioning the Fabry-Perot interference filter by using the suction collet after the second step,
wherein the suction collet includes: a main body having a surface provided with an opening for air intake; and a contact portion that is provided on the surface so as to protrude from the surface and that includes a contact surface,
the laminated structure is provided with a membrane structure including a first mirror portion and a second mirror portion facing each other via a gap and in which a distance from each other is variable and including a portion of the main surface,
in the first step, the suction collet is arranged such that the contact surface faces a bottom surface of the thinned portion,
in the second step, the contact surface is brought into contact with the bottom surface while forming a space between the surface and the main surface, and
in the third step, an inside of the space is exhausted by the air intake through the opening.