CPC B06B 1/0681 (2013.01) [B06B 1/0666 (2013.01); B81B 7/0016 (2013.01); B81C 1/00825 (2013.01); B81B 2201/0264 (2013.01); B81B 2201/0271 (2013.01); B81B 2203/0127 (2013.01); B81B 2203/0163 (2013.01)] | 20 Claims |
1. A MEMS acoustic transducer of an ultrasonic type, comprising:
a body of semiconductor material, the body having first and second surfaces opposite to each other;
a first cavity in the body;
a sensitive portion suspended in the first cavity and extending between the first cavity and the first surface of the body, the sensitive portion including a second central cavity and a membrane extending between the second central cavity and the first surface of the body; and
an elastic supporting structure coupling the sensitive portion to the body, the elastic supporting structure being suspended in the first cavity.
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