US 11,865,543 B2
Multilayer electrical connection for digital microfluidics on substrates
Jian Gong, Danville, CA (US); Liang Wang, Newark, CA (US); Yan-You Lin, Fremont, CA (US); and Cheng Frank Zhong, Menlo Park, CA (US)
Assigned to MGI Tech Co., Ltd., Shenzhen (CN)
Appl. No. 17/287,920
Filed by MGI Tech Co., Ltd., Shenzhen (CN)
PCT Filed Nov. 8, 2019, PCT No. PCT/CN2019/116529
§ 371(c)(1), (2) Date Apr. 22, 2021,
PCT Pub. No. WO2020/094116, PCT Pub. Date May 14, 2020.
Claims priority of provisional application 62/758,071, filed on Nov. 9, 2018.
Prior Publication US 2021/0379594 A1, Dec. 9, 2021
Int. Cl. B01L 3/00 (2006.01); G01N 27/447 (2006.01); G02B 26/00 (2006.01)
CPC B01L 3/502792 (2013.01) [B01L 3/50273 (2013.01); B01L 3/502707 (2013.01); B01L 3/502715 (2013.01); G01N 27/44791 (2013.01); B01L 2200/16 (2013.01); B01L 2300/0645 (2013.01); B01L 2300/0819 (2013.01); B01L 2300/165 (2013.01); B01L 2300/1827 (2013.01); B01L 2400/0427 (2013.01); G02B 26/005 (2013.01)] 13 Claims
OG exemplary drawing
 
1. An apparatus for manipulating a droplet, the apparatus comprising:
(a) a multi-layer ceramic substrate comprising:
(i) a first surface and a second surface;
(ii) a first array of electrodes on the first surface;
(iii) a plurality of contact pads spaced apart from each other and disposed on the second surface; and
(iv) one or more interconnect layers disposed between the first surface and the second surface and configured to electrically couple one or more of the plurality of contact pads with one of the electrodes of the first array of electrodes;
(b) a disposable single-layer substrate made of silicon or glass, the disposable single-layer substrate comprising:
(i) a third surface and a fourth surface and a plurality of through-holes extending from the third surface to the fourth surface;
(ii) a second array of electrodes on the third surface; and
(iii) a plurality of electrically conductive features coupled to the second array of electrodes and filling the through-holes, each of the electrically conductive features comprising a raised portion protruding from the fourth surface and aligned with one of the electrodes of the first array of electrodes when the disposable single-layer substrate is removably attached to the multi-layer ceramic substrate;
(iv) wherein the disposable single-layer substrate is a substrate configured to receive the droplet for manipulation on the third surface, and the second array of electrodes is configured to receive electrical signals from the first array of electrodes to electrically manipulate the droplet; and
(c) a mechanical fastening member configured to removably attach the disposable single-layer substrate to the multi-layer ceramic substrate; whereby the multi-layer ceramic substrate serves as an interposer between an instrument and the disposable single-layer substrate.