US 11,864,453 B2
Mask and method of manufacturing the same
Youngmin Moon, Yongin-si (KR); Minho Moon, Seongnam-si (KR); Ji-Hee Son, Hwaseong-si (KR); Seungyong Song, Suwon-si (KR); Sungsoon Im, Suwon-si (KR); and Junho Jo, Seoul (KR)
Assigned to Samsung Display Co., Ltd., Yongin-si (KR)
Filed by Samsung Display Co., Ltd., Yongin-si (KR)
Filed on Oct. 26, 2021, as Appl. No. 17/452,279.
Claims priority of application No. 10-2021-0016867 (KR), filed on Feb. 5, 2021.
Prior Publication US 2022/0255049 A1, Aug. 11, 2022
Int. Cl. H01L 51/56 (2006.01); C23C 14/04 (2006.01); C23C 14/24 (2006.01); B23K 26/244 (2014.01); B23K 26/364 (2014.01); H10K 71/00 (2023.01); B23K 26/0622 (2014.01)
CPC H10K 71/00 (2023.02) [B23K 26/244 (2015.10); B23K 26/364 (2015.10); C23C 14/042 (2013.01); C23C 14/24 (2013.01); B23K 26/0622 (2015.10)] 10 Claims
OG exemplary drawing
 
1. A mask comprising:
a mask frame comprising a base part in which cell openings are defined, and a coating part surrounding edges of the cell openings, covering at least a portion of an upper surface of the base part, and comprising a material composition that is different from that of the base part; and
unit masks on the mask frame, respectively corresponding to the cell openings, comprising a material composition that is different from that of the coating part, and in which openings are defined.