CPC H05F 3/06 (2013.01) | 19 Claims |
1. A system for reducing charge on a workpiece, comprising:
a platen comprising a top surface having one or more openings;
one or more backside gas channels, each in communication with a respective opening on the top surface;
an ionizer, in communication with a backside gas supply to generate ionized gas;
a valving system having an outlet in communication with the one or more backside gas channels, a first inlet in communication with the backside gas supply and a second inlet in communication with an output of the ionizer; and
a controller, in communication with the valving system, to selectively allow a first amount of backside gas from the first inlet and a second amount of the ionized gas from the second inlet to pass to the outlet and into the one or more backside gas channels.
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