US 11,864,299 B2
System and method for dissipating workpiece charge build up
David Morrell, Gloucester, MA (US); Dawei Sun, Lynnfield, MA (US); and Qin Chen, South Hamilton, MA (US)
Assigned to Applied Materials, Inc., Santa Clara, CA (US)
Filed by Applied Materials, Inc., Santa Clara, CA (US)
Filed on May 10, 2022, as Appl. No. 17/740,859.
Prior Publication US 2023/0371160 A1, Nov. 16, 2023
Int. Cl. H05F 3/06 (2006.01)
CPC H05F 3/06 (2013.01) 19 Claims
OG exemplary drawing
 
1. A system for reducing charge on a workpiece, comprising:
a platen comprising a top surface having one or more openings;
one or more backside gas channels, each in communication with a respective opening on the top surface;
an ionizer, in communication with a backside gas supply to generate ionized gas;
a valving system having an outlet in communication with the one or more backside gas channels, a first inlet in communication with the backside gas supply and a second inlet in communication with an output of the ionizer; and
a controller, in communication with the valving system, to selectively allow a first amount of backside gas from the first inlet and a second amount of the ionized gas from the second inlet to pass to the outlet and into the one or more backside gas channels.