US 11,863,157 B2
Vibrator device
Junichi Takeuchi, Chino (JP); and Hisahiro Ito, Minowa-machi (JP)
Assigned to SEIKO EPSON CORPORATION, Tokyo (JP)
Filed by SEIKO EPSON CORPORATION, Tokyo (JP)
Filed on Feb. 25, 2021, as Appl. No. 17/185,174.
Claims priority of application No. 2020-033743 (JP), filed on Feb. 28, 2020.
Prior Publication US 2021/0273628 A1, Sep. 2, 2021
Int. Cl. H03H 9/05 (2006.01); H03B 5/32 (2006.01); H03H 9/19 (2006.01); H03H 9/10 (2006.01)
CPC H03H 9/0552 (2013.01) [H03B 5/32 (2013.01); H03H 9/1021 (2013.01); H03H 9/19 (2013.01)] 5 Claims
OG exemplary drawing
 
1. A vibrator device comprising:
a vibrator element;
a semiconductor substrate having a first surface on which the vibrator element is disposed and a second surface positioned on an opposite side of the first surface;
a fractional N-PLL circuit disposed at the second surface;
a wiring that is disposed at the first surface and electrically couples the vibrator element and the fractional N-PLL circuit; and
an output terminal that is disposed at the second surface side of the semiconductor substrate, is electrically coupled to the fractional N-PLL circuit, and outputs a signal from the fractional N-PLL circuit, wherein
the output terminal does not overlap the wiring in a plan view along a thickness direction of the semiconductor substrate.