US 11,862,942 B2
Vertical-cavity surface-emitting laser array with a tilted emitter pattern
Mohammad Ali Shirazi Hosseini Dokht, Milpitas, CA (US); Matthew Glenn Peters, Menlo Park, CA (US); and John Michael Miller, Gatineau (CA)
Assigned to Lumentum Operations LLC, San Jose, CA (US)
Filed by Lumentum Operations LLC, San Jose, CA (US)
Filed on Sep. 29, 2020, as Appl. No. 16/948,700.
Claims priority of provisional application 63/041,427, filed on Jun. 19, 2020.
Prior Publication US 2021/0399530 A1, Dec. 23, 2021
Int. Cl. H01S 5/42 (2006.01); G02B 27/42 (2006.01); G02B 27/30 (2006.01)
CPC H01S 5/423 (2013.01) [G02B 27/30 (2013.01); G02B 27/425 (2013.01)] 20 Claims
OG exemplary drawing
 
1. A vertical-cavity surface-emitting laser (VCSEL) array, comprising:
a semiconductor substrate; and
a plurality of emitters on the substrate that conforms to an emitter pattern,
wherein the emitter pattern is oriented at a non-zero angle to a rectilinear axis of a diffractive optical element (DOE),
wherein the rectilinear axis is perpendicular to an optical axis of the DOE and horizontally or vertically aligned with a reference edge of a chip of the VCSEL array,
wherein the emitter pattern comprises two or more unit cells arranged to form the emitter pattern,
wherein each unit cell, of the two or more unit cells, includes a same number of emitters, and
wherein the two or more unit cells are arranged to cause a measurement of misalignment associated with two adjacent unit cells, of the two or more unit cells, to satisfy a misalignment threshold; and
the DOE configured to generate a dot projection from light emitted by the plurality of emitters of the VCSEL array,
wherein the dot projection comprises a plurality of tiles.