CPC H01L 22/30 (2013.01) [H01L 23/544 (2013.01); H01L 22/12 (2013.01)] | 20 Claims |
1. A target comprising:
an array of cells comprising a first cell, a second cell, a third cell, and a fourth cell, each comprising a periodic structure with a pitch, wherein the periodic structure includes a first section and a second section, separated by a first gap; and
an electron beam overlay target disposed in a center of the array of cells comprising the first cell, the second cell, the third cell, and the fourth cell.
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