CPC H01L 21/6833 (2013.01) [H01L 21/68757 (2013.01); H01L 21/68785 (2013.01)] | 5 Claims |
1. An electrostatic chuck comprising:
a plurality of ceramic substrates each having a step formed at a peripheral edge portion of one surface, the ceramic substrates being arranged adjacent to each other so that the steps face each other;
electrodes each embedded in each of the plurality of ceramic substrates; and
a filling portion that fills a groove portion formed by the facing steps of the adjacent ceramic substrates,
wherein the filling portion is formed in a position in which it does not overlap the electrodes, as seen from above and side.
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