US 11,862,500 B2
Apparatus for manufacturing display device and method for manufacturing display device
Jae Won Shim, Yongin-si (KR); Yoon Jae Lee, Yongin-si (KR); Sung Lae Kim, Hwaseong-si (KR); Kang Won Lee, Gumi-si (KR); and Kyung Hoon Chung, Seongnam-si (KR)
Assigned to Samsung Display Co., Ltd., Yongin-si (KR)
Filed by Samsung Display Co., Ltd., Yongin-si (KR)
Filed on Jan. 21, 2021, as Appl. No. 17/154,861.
Claims priority of application No. 10-2020-0051949 (KR), filed on Apr. 29, 2020.
Prior Publication US 2021/0343566 A1, Nov. 4, 2021
Int. Cl. H01L 21/683 (2006.01); H01L 21/687 (2006.01); C23C 14/24 (2006.01); C23C 14/50 (2006.01); H10K 71/16 (2023.01)
CPC H01L 21/6833 (2013.01) [C23C 14/24 (2013.01); C23C 14/50 (2013.01); H01L 21/6875 (2013.01); H01L 21/68771 (2013.01); H10K 71/16 (2023.02)] 11 Claims
OG exemplary drawing
 
1. An apparatus for manufacturing a display device, the apparatus comprising:
a first housing having a first chamber;
a support member disposed in the first chamber and including a frame having a plurality of openings;
a plurality of adhesive patterns disposed on the frame; and
a plurality of electrostatic supports overlapping the plurality of openings and supported for reciprocal movement in respective ones of the openings.