CPC H01L 21/30625 (2013.01) [B24B 37/042 (2013.01); C01B 33/14 (2013.01); C01P 2004/64 (2013.01)] | 16 Claims |
1. A silica particle which satisfies the following formula (1):
y≥4.2 (1)
where a d value measured by wide-angle X-ray scattering is y Å.
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