US 11,862,407 B2
Preparation method for perovskite film, and related perovskite film and solar cell
Yandong Wang, Ningde (CN); Zhaohui Liu, Ningde (CN); Shuojian Su, Ningde (CN); Yongsheng Guo, Ningde (CN); Guodong Chen, Ningde (CN); and Chuying Ouyang, Ningde (CN)
Assigned to CONTEMPORARY AMPEREX TECHNOLOGY CO., LIMITED, Ningde (CN)
Filed by CONTEMPORARY AMPEREX TECHNOLOGY CO., LIMITED, Ningde (CN)
Filed on Nov. 28, 2022, as Appl. No. 17/994,455.
Application 17/994,455 is a continuation of application No. PCT/CN2021/132097, filed on Nov. 22, 2021.
Prior Publication US 2023/0170156 A1, Jun. 1, 2023
Int. Cl. H10K 71/16 (2023.01); H01G 9/20 (2006.01); H01G 9/00 (2006.01); H10K 30/30 (2023.01); H10K 30/40 (2023.01); H10K 30/82 (2023.01); C23C 14/58 (2006.01); C23C 14/06 (2006.01); H10K 85/30 (2023.01)
CPC H01G 9/2009 (2013.01) [C23C 14/06 (2013.01); C23C 14/0694 (2013.01); C23C 14/584 (2013.01); C23C 14/5846 (2013.01); H01G 9/0029 (2013.01); H01G 9/0036 (2013.01); H10K 30/30 (2023.02); H10K 30/40 (2023.02); H10K 30/82 (2023.02); H10K 71/164 (2023.02); H10K 85/30 (2023.02)] 8 Claims
OG exemplary drawing
 
1. A method for preparing a perovskite film, including steps of
(1) providing a target material comprising following elements: lead, a halogen, and one or more alkali metals;
(2) sputtering using the target material in step (1) with a process gas, where the process gas is a noble gas so as to obtain a film;
(3) subjecting the film obtained in step (2) to a chemical bath treatment using a chemical bath, wherein the chemical bath is a solution of AX, A is selected from one or more of formamidine or methylamine, and X is a halogen; and
(4) sputtering on the film obtained in step (3) using a tin metal with another process gas, where the another process gas comprises a noble gas so as to obtain the perovskite film.