CPC H01G 9/2009 (2013.01) [C23C 14/06 (2013.01); C23C 14/0694 (2013.01); C23C 14/584 (2013.01); C23C 14/5846 (2013.01); H01G 9/0029 (2013.01); H01G 9/0036 (2013.01); H10K 30/30 (2023.02); H10K 30/40 (2023.02); H10K 30/82 (2023.02); H10K 71/164 (2023.02); H10K 85/30 (2023.02)] | 8 Claims |
1. A method for preparing a perovskite film, including steps of
(1) providing a target material comprising following elements: lead, a halogen, and one or more alkali metals;
(2) sputtering using the target material in step (1) with a process gas, where the process gas is a noble gas so as to obtain a film;
(3) subjecting the film obtained in step (2) to a chemical bath treatment using a chemical bath, wherein the chemical bath is a solution of AX, A is selected from one or more of formamidine or methylamine, and X is a halogen; and
(4) sputtering on the film obtained in step (3) using a tin metal with another process gas, where the another process gas comprises a noble gas so as to obtain the perovskite film.
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