CPC G06T 7/0012 (2013.01) [G01N 21/64 (2013.01); G06T 2207/10056 (2013.01); G06T 2207/10064 (2013.01)] | 4 Claims |
1. An imaging data processing device that has an input unit and a display unit as user interfaces and processes first imaging data obtained by performing a measurement on a plurality of minute areas in a two-dimensional area on a sample by a first measurement method, and second imaging data obtained by performing a measurement on a range including at least a part of the two-dimensional area on the sample by a second measurement method different from the first measurement method, the device comprising:
a) an image display processor configured to superimpose and display a first image created on a basis of the first imaging data and a second image created on a basis of the second imaging data over a substantially same range on a sample in a screen of the display unit, and superpose and display grid points at predetermined spacing on the superimposed images;
b) a deformation range specification receiving section configured to allow a user to specify an image deformation range by an operation via an input unit on the superimposed images with the grid points superposed and displayed by the image display processor; and
c) an image deformation processor configured to accept the user's selection of a grid point included in the image deformation range specified by the deformation range specification receiving section from among the grid points superposed and displayed on the superimposed images by the image display processor via the input unit and the user's operation of moving the selected grid point on the superimposed images, the processor being configured to deform, in accordance with the selection and the moving operation, an image within the image deformation instructed range in one of the two images that are superimposed and displayed.
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