US 11,861,817 B2
Method implemented by a data processing apparatus, and charged particle beam device for inspecting a specimen using such a method
Remco Schoenmakers, Eindhoven (NL); Maurice Peemen, Eindhoven (NL); and Pavel Potocek, Eindhoven (NL)
Assigned to FEI Company, Hillsboro, OR (US)
Filed by FEI Company, Hillsboro, OR (US)
Filed on Apr. 20, 2021, as Appl. No. 17/235,117.
Claims priority of application No. 20170443 (EP), filed on Apr. 20, 2020.
Prior Publication US 2021/0327677 A1, Oct. 21, 2021
Int. Cl. H01J 37/28 (2006.01); G06K 9/00 (2022.01); G06K 9/32 (2006.01); G06K 9/03 (2006.01); G06T 7/00 (2017.01); G06V 20/69 (2022.01)
CPC G06T 7/0002 (2013.01) [G06V 20/693 (2022.01); H01J 37/28 (2013.01); G06T 2207/10061 (2013.01); G06T 2207/20084 (2013.01)] 20 Claims
OG exemplary drawing
 
10. A charged particle beam device for inspection of a specimen, comprising:
a specimen holder for holding a specimen;
a source for producing a beam of charged particles;
an illuminator for focusing said charged particle beam onto said specimen;
a detector for detecting a flux of radiation emanating from the specimen in response to said irradiation by said charged particle beam; and
a data processing apparatus coupled to at least the detector, and the data processing apparatus including code that, when executed by the data processing apparatus, causes the data processing apparatus to:
receive an image;
provide a set-point for a desired image quality parameter of said image;
process said image using an image analysis technique to determine a current image quality parameter of said image;
compare said current image quality parameter with said set-point, and generate, based on said comparison, a modified image based on an image modification technique, wherein to generate a modified image comprises:
improve said image in terms of said image quality parameter in case said current image quality parameter is lower than said set-point; and
deteriorate said image in terms of said image quality parameter in case said current image quality parameter exceeds said set-point; and
output and analyse said modified image, wherein said analysing comprises the step of using an artificial neural network (ANN) and/or a convolutional neural network (CNN) on said modified image.