CPC G03F 7/705 (2013.01) [G03F 7/7065 (2013.01); G03F 7/70525 (2013.01); G03F 7/70658 (2013.01)] | 21 Claims |
1. A method comprising:
obtaining image data of a plurality of features on at least part of at least one region on a substrate;
using the image data to obtain one or more dimensions of at least some features out of the plurality of features;
determining a value of a statistical parameter based on a value of variation of the one or more dimensions and a mean value of the one or more dimensions;
obtaining a probability of defective manufacture of features in dependence on a determined number of defective features in the image data; and
determining, using a hardware computer, a characteristic of one or more processes for manufacturing features on a substrate by deriving a relation between the probability of defective manufacture of features and the value of the statistical parameter.
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