CPC G03F 7/031 (2013.01) [B32B 27/281 (2013.01); C08G 73/128 (2013.01); G03F 7/038 (2013.01); H01L 23/293 (2013.01); H01L 23/5329 (2013.01); B32B 2255/10 (2013.01); B32B 2255/205 (2013.01); G03F 7/162 (2013.01); G03F 7/168 (2013.01); G03F 7/2004 (2013.01); G03F 7/325 (2013.01); G03F 7/38 (2013.01)] | 20 Claims |
1. A photosensitive resin composition comprising:
a heterocyclic ring-containing polymer precursor selected from a polyimide precursor and a polybenzoxazole precursor; and
a solvent;
wherein an amine value of the heterocyclic ring-containing polymer precursor is 0.0010 to 0.0300 mmol/g; and
wherein a solid content of the photosensitive resin composition has an amine value of 0.0002 to 0.0200 mmol/g.
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