US 11,860,421 B2
Multi-tip optical coupling devices
Weiwei Song, San Jose, CA (US); Chan-Hong Chern, Palo Alto, CA (US); Chewn-Pu Jou, Hsinchu (TW); Stefan Rusu, Sunnyvale, CA (US); and Min-Hsiang Hsu, Hsinchu (TW)
Assigned to Taiwan Semiconductor Manufacturing Co., Ltd., Hsinchu (TW)
Filed by Taiwan Semiconductor Manufacturing Co., Ltd., Hsinchu (TW)
Filed on Nov. 13, 2020, as Appl. No. 17/097,270.
Prior Publication US 2022/0155524 A1, May 19, 2022
Int. Cl. G02B 6/30 (2006.01); G02B 6/26 (2006.01)
CPC G02B 6/305 (2013.01) [G02B 6/262 (2013.01); G02B 6/30 (2013.01)] 20 Claims
OG exemplary drawing
 
1. An optical system, comprising:
a substrate;
a waveguide disposed on the substrate;
an optical fiber optically coupled to the waveguide; and
an optical coupling device disposed between the optical fiber and the waveguide and configured to optically couple the optical fiber to the waveguide,
wherein the optical coupling device comprises:
a dielectric layer disposed on the substrate,
a semiconductor tapered structure, disposed in a first horizontal plane within the dielectric layer, comprising a semiconductor tip end facing the optical fiber and a semiconductor base end facing the waveguide, wherein a width of the semiconductor base end is greater than a width of the semiconductor tip end, and
a multi-tip dielectric structure, disposed in a second horizontal plane within the dielectric layer, comprising a dielectric tip end facing the optical fiber and a dielectric base end facing the waveguide,
wherein the first and second horizontal planes are different from each other, and
wherein the semiconductor base end is substantially aligned with the dielectric base end.