US 11,860,412 B2
Temperature-stabilized integrated waveguides
Subal Sahni, La Jolla, CA (US); Kamal V. Karimanal, San Jose, CA (US); Gianlorenzo Masini, Carlsbad, CA (US); Attila Mekis, Carlsbad, CA (US); and Roman Bruck, Vienna (AT)
Assigned to Cisco Technology, Inc., San Jose, CA (US)
Filed by Cisco Technology, Inc., San Jose, CA (US)
Filed on Oct. 27, 2020, as Appl. No. 17/081,852.
Prior Publication US 2022/0128761 A1, Apr. 28, 2022
Int. Cl. G02B 6/122 (2006.01); G02B 6/12 (2006.01)
CPC G02B 6/1225 (2013.01) [G02B 6/12014 (2013.01); G02B 2006/12061 (2013.01); G02B 2006/12107 (2013.01); G02B 2006/12135 (2013.01)] 19 Claims
OG exemplary drawing
 
1. A photonic device comprising:
a waveguide comprising a refractive index, wherein the refractive index changes according to a thermo-optic effect as a temperature of the photonic device fluctuates; and
a compensation structure comprising:
at least one compensation structure layer positioned above a waveguide plane comprising the waveguide;
at least one additional compensation structure layer positioned below the waveguide plane; and
at least one further compensation structure layer within the waveguide plane; and
wherein the at least one compensation structure layer is positioned on the photonic device at a first distance from the waveguide, wherein the compensation structure applies a compensation stress on the waveguide via pressure exerted by the compensation structure on surrounding materials between the compensation structure and the waveguide as the temperature of the photonic device increases during operation, wherein the compensation stress alters the thermo-optic effect on the refractive index of the waveguide to counteract a change in the refractive index as the temperature of the photonic device increases.