CPC G01Q 60/40 (2013.01) [G01Q 10/065 (2013.01); G01Q 70/06 (2013.01)] | 17 Claims |
1. A binary state scanning probe microscope comprising:
a probe of scanning a surface of a sample, wherein the probe includes a substrate, a plurality of electrodes formed on the substrate, and a tip array provided on the substrate and including a plurality of conductive tips electrically connected to the plurality of electrodes, respectively, wherein the conductive tips are compressible and relaxed;
a driving unit including a piezo actuator moving the probe with respect to the sample;
a voltage applying unit applying a voltage to the sample;
a data unit converting an electrical signal applied to each electrode into a data signal; and
an imaging unit receiving the data signal from the data unit and generating an image of the sample surface based on the data signal.
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