US 11,860,188 B2
Probe for scanning probe microscope and binary state scanning probe microscope including the same
Wooyoung Shim, Seoul (KR); and Gwangmook Kim, Seoul (KR)
Assigned to Industry-Academic Cooperation Foundation, Yonsei University, Seoul (KR)
Filed by Industry-Academic Cooperation Foundation, Yonsei University, Seoul (KR)
Filed on Mar. 24, 2022, as Appl. No. 17/703,791.
Claims priority of application No. 10-2021-0038446 (KR), filed on Mar. 25, 2021.
Prior Publication US 2022/0308086 A1, Sep. 29, 2022
Int. Cl. G01Q 70/06 (2010.01); G01Q 60/40 (2010.01); G01Q 10/06 (2010.01)
CPC G01Q 60/40 (2013.01) [G01Q 10/065 (2013.01); G01Q 70/06 (2013.01)] 17 Claims
OG exemplary drawing
 
1. A binary state scanning probe microscope comprising:
a probe of scanning a surface of a sample, wherein the probe includes a substrate, a plurality of electrodes formed on the substrate, and a tip array provided on the substrate and including a plurality of conductive tips electrically connected to the plurality of electrodes, respectively, wherein the conductive tips are compressible and relaxed;
a driving unit including a piezo actuator moving the probe with respect to the sample;
a voltage applying unit applying a voltage to the sample;
a data unit converting an electrical signal applied to each electrode into a data signal; and
an imaging unit receiving the data signal from the data unit and generating an image of the sample surface based on the data signal.