CPC G01P 15/18 (2013.01) [G01C 21/165 (2013.01); G01C 21/18 (2013.01); G01S 19/47 (2013.01); G01S 19/49 (2013.01); B81B 2201/0235 (2013.01); B81B 2201/0242 (2013.01)] | 9 Claims |
1. An inertial measurement unit comprising:
a substrate;
a multi-axis inertial sensor having a three-axis angular velocity sensor; and
a gyro sensor that detects angular velocity of one axis in a gravitational direction, the gyro sensor including a gyro sensor element and a package accommodating the gyro sensor element,
wherein the multi-axis inertial sensor and the gyro sensor are installed on the substrate,
the gyro sensor includes a first support base and a second support base, and the first and second support bases constitute a support portion supporting the gyro sensor element, and
the package accommodates the first support base and the second support base.
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