US 11,860,185 B2
Inertia measurement device, vehicle, and electronic device
Yusuke Kinoshita, Minowa (JP); and Nobuyuki Imai, Shiojiri (JP)
Assigned to SEIKO EPSON CORPORATION
Filed by SEIKO EPSON CORPORATION, Tokyo (JP)
Filed on Dec. 1, 2022, as Appl. No. 18/072,836.
Application 18/072,836 is a continuation of application No. 17/643,603, filed on Dec. 10, 2021, granted, now 11,549,962.
Application 17/643,603 is a continuation of application No. 17/197,121, filed on Mar. 10, 2021, granted, now 11,231,442, issued on Jan. 25, 2022.
Application 17/197,121 is a continuation of application No. 16/295,008, filed on Mar. 7, 2019, granted, now 10,976,342, issued on Apr. 13, 2021.
Claims priority of application No. 2018-042387 (JP), filed on Mar. 8, 2018.
Prior Publication US 2023/0120267 A1, Apr. 20, 2023
Int. Cl. G01P 15/18 (2013.01); G01C 21/16 (2006.01); G01C 21/18 (2006.01); G01S 19/47 (2010.01); G01S 19/49 (2010.01)
CPC G01P 15/18 (2013.01) [G01C 21/165 (2013.01); G01C 21/18 (2013.01); G01S 19/47 (2013.01); G01S 19/49 (2013.01); B81B 2201/0235 (2013.01); B81B 2201/0242 (2013.01)] 9 Claims
OG exemplary drawing
 
1. An inertial measurement unit comprising:
a substrate;
a multi-axis inertial sensor having a three-axis angular velocity sensor; and
a gyro sensor that detects angular velocity of one axis in a gravitational direction, the gyro sensor including a gyro sensor element and a package accommodating the gyro sensor element,
wherein the multi-axis inertial sensor and the gyro sensor are installed on the substrate,
the gyro sensor includes a first support base and a second support base, and the first and second support bases constitute a support portion supporting the gyro sensor element, and
the package accommodates the first support base and the second support base.