US 11,860,110 B2
Article inspection apparatus using spectrum analyzer
Shigeo Arai, Kanagawa (JP); Eiji Taniguchi, Kanagawa (JP); and Takashi Suzuki, Kanagawa (JP)
Assigned to ANRITSU CORPORATION, Kanagawa (JP)
Filed by ANRITSU CORPORATION, Kanagawa (JP)
Filed on Jul. 21, 2022, as Appl. No. 17/814,034.
Claims priority of application No. 2021-123075 (JP), filed on Jul. 28, 2021.
Prior Publication US 2023/0035626 A1, Feb. 2, 2023
Int. Cl. G01N 21/95 (2006.01); G01N 21/84 (2006.01); G01N 21/88 (2006.01)
CPC G01N 21/9508 (2013.01) [G01N 21/8806 (2013.01); G01N 2021/845 (2013.01)] 12 Claims
OG exemplary drawing
 
1. An article inspection apparatus comprising:
a transport path configured to transport an article for inspection to an article inspection position;
a light irradiation emitter configured to irradiate the article transported to the article inspection position with light;
a light detector configured to detect light transmitted through or reflected from the article; and
a spectrum analyzer configured to inspect a quality of the article based on spectral characteristics of the light detected by the light detector,
wherein the spectrum analyzer is configured to standardize a measured value of a spectrum of the light detected by the light detector for each wavelength and to determine whether the article is a normal product or a defective product based on a standardized value,
wherein the spectrum analyzer is configured to determine whether the article is the normal product or the defective product based on a threshold value for the standardized value,
wherein the spectrum analyzer is configured to set the threshold value for the standardized value for each range divided in a wavelength direction.