US 11,860,104 B2
Accurate raman spectroscopy
Eyal Hollander, Ramat Hasharon (IL); Gilad Barak, Rehovot (IL); Elad Schleifer, Rehovot (IL); Yonatan Oren, Kiryat Ono (IL); and Amir Shayari, Rehovot (IL)
Assigned to NOVA LTD, Rehovot (IL)
Filed by NOVA LTD., Rehovot (IL)
Filed on Aug. 1, 2022, as Appl. No. 17/816,713.
Application 17/816,713 is a continuation of application No. 17/020,587, filed on Sep. 14, 2020, granted, now 11,415,519.
Prior Publication US 2023/0168200 A1, Jun. 1, 2023
Int. Cl. G01J 3/44 (2006.01); G01N 21/65 (2006.01); G01J 3/02 (2006.01)
CPC G01N 21/65 (2013.01) [G01J 3/0205 (2013.01); G01J 3/027 (2013.01); G01J 3/4412 (2013.01); G01N 2201/0636 (2013.01); G01N 2201/06113 (2013.01)] 19 Claims
OG exemplary drawing
 
1. An optical measurement system that comprises:
i. optics, wherein the optics comprise an illumination path and a collection path;
ii. a Raman detector;
iii. at least one adjustable spatial filter positioned upstream to the Raman detector; and
iv. a controller that is configured to generate or receive at least one filtering parameter of a spatial filtering process that is applied before a Raman detector; and
v. wherein the optics are configured to acquire Raman spectrums of multiple sites of the sample while applying the at least one filtering parameter;
wherein the optics comprises a rotatable wedge prism, wherein the controller is configured to control a rotation of the wedge prism to find an orientation of the wedge prism that once applied will direct an impinging beam generated by the optical measurement system through a compensating path of propagation of the impinging beam.