CPC G01N 21/6402 (2013.01) [G01J 3/0232 (2013.01); G01J 3/4406 (2013.01); G01J 3/2889 (2013.01); G01J 2003/064 (2013.01); G01N 2021/6419 (2013.01); G01N 2021/6421 (2013.01); H01S 5/1092 (2013.01)] | 20 Claims |
1. A system for inspecting a surface, comprising:
an optical system including at least one optical element, the optical system configured to:
direct a first pulse of light having a first wavelength to a first point along a scan line and a second pulse of light having a second wavelength to a second point along the scan line during a first time period, and
direct a third pulse of light having the first wavelength to the second point and a fourth pulse of light having the second wavelength to the first point during a second time period; and
a gated camera configured to:
record a first fluorescent response of the surface to the first pulse of light and a second fluorescent response of the surface to the second pulse of light, and
record a third fluorescent response of the surface to the third pulse of light and a fourth fluorescent response of the surface to the fourth pulse of light.
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