US 11,860,083 B2
Apparatus and method of testing an object within a dry gas environment
Dahm Yu, Asan-si (KR); Jaehyun Kim, Hwaseong-si (KR); Seonmi Lee, Asan-si (KR); Hyunmin Kwon, Jeonju-si (KR); and Sangjun Lee, Cheonan-si (KR)
Assigned to SAMSUNG ELECTRONICS CO, LTD., Suwon-si (KR)
Filed by SAMSUNG ELECTRONICS CO., LTD., Suwon-si (KR)
Filed on Jul. 8, 2021, as Appl. No. 17/370,090.
Claims priority of application No. 10-2020-0169442 (KR), filed on Dec. 7, 2020.
Prior Publication US 2022/0178815 A1, Jun. 9, 2022
Int. Cl. G01N 19/10 (2006.01); G01R 31/28 (2006.01)
CPC G01N 19/10 (2013.01) [G01R 31/2862 (2013.01); G01R 31/2881 (2013.01); G01R 31/2874 (2013.01)] 20 Claims
OG exemplary drawing
 
18. An apparatus for testing an object, the apparatus comprising:
a test chamber;
a test board for testing an object, the test board disposed within the test chamber;
a first chamber adjacent to the test chamber with a lower surface of the test board exposed to the first chamber;
a second chamber at least partially surrounding the first chamber and isolating the first chamber from ambient air; and
a gas supply module supplying a dry gas to the second chamber and providing the second chamber with a positive pressure that is higher than an ambient pressure, thereby preventing the ambient air from infiltrating into the first chamber,
wherein the first chamber has an upper end in contact with a lower surface of the test chamber, and the second chamber has an upper end in contact with the lower surface of the test chamber.