CPC G01M 13/005 (2013.01) [G01M 13/003 (2019.01); H01J 37/32513 (2013.01)] | 39 Claims |
1. A method for monitoring seal life comprising:
providing a valve assembly movable from an open position to a closed position and comprising a door configured for covering an opening in a process chamber, a valve for operating the door from the open position to the closed position, and a seal having elastomeric properties seated within the valve in contact with a surface of the valve assembly, wherein the valve operates the door from the open position to a closed position, and when the seal is in operation it is subject to degradation;
placing at least one sensor for measuring micro strain on an exterior surface of the door of the valve assembly or within the valve assembly;
placing the valve assembly in an operation wherein the seal is subject to degradation and initiating the operation of the valve assembly;
at a time after the operation is initiated, recording micro strain data and at least one other property related to a condition selected from an ambient condition of operation and a condition related to degradation of the seal; and
analyzing the recorded data against baseline data associated with 100% seal life to evaluate seal life at the time after the operation is initiated as a percentage of seal life less than 100%.
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