US 11,860,059 B2
Smart seals for monitoring and analysis of seal properties useful in semiconductor valves
Carmen J. Quartapella, Collegeville, PA (US); Mookkan Periyasamy, Wilmington, DE (US); Elizabeth Sassano, West Chester, PA (US); Otto J. Gregory, Narragansett, RI (US); Godi Fischer, Wakefield, RI (US); Tao Wei, West Kingston, RI (US); Zakary Kinzel, Narragansett, RI (US); and Noah A. Burke, Cumberland, RI (US)
Filed by Greene, Tweed Technologies, Inc., Wilmington, DE (US); and University of Rhode Island Board of Trustees, Kingston, RI (US)
Filed on May 30, 2020, as Appl. No. 16/888,726.
Claims priority of provisional application 62/855,639, filed on May 31, 2019.
Prior Publication US 2020/0378867 A1, Dec. 3, 2020
Int. Cl. G01M 13/005 (2019.01); G01M 13/003 (2019.01); H01J 37/32 (2006.01)
CPC G01M 13/005 (2013.01) [G01M 13/003 (2019.01); H01J 37/32513 (2013.01)] 39 Claims
OG exemplary drawing
 
1. A method for monitoring seal life comprising:
providing a valve assembly movable from an open position to a closed position and comprising a door configured for covering an opening in a process chamber, a valve for operating the door from the open position to the closed position, and a seal having elastomeric properties seated within the valve in contact with a surface of the valve assembly, wherein the valve operates the door from the open position to a closed position, and when the seal is in operation it is subject to degradation;
placing at least one sensor for measuring micro strain on an exterior surface of the door of the valve assembly or within the valve assembly;
placing the valve assembly in an operation wherein the seal is subject to degradation and initiating the operation of the valve assembly;
at a time after the operation is initiated, recording micro strain data and at least one other property related to a condition selected from an ambient condition of operation and a condition related to degradation of the seal; and
analyzing the recorded data against baseline data associated with 100% seal life to evaluate seal life at the time after the operation is initiated as a percentage of seal life less than 100%.