US 11,860,018 B2
Rate-of-change flow measurement device
Thomas Hoke, Stateline, NV (US); Tyson Stephenson, Reno, NV (US); and Patrick Lowery, Reno, NV (US)
Assigned to HORIBA STEC, Co., Ltd., Kyoto (JP)
Filed by HORIBA STEC, Co., Ltd., Kyoto (JP)
Filed on Jul. 16, 2021, as Appl. No. 17/377,774.
Claims priority of provisional application 63/065,995, filed on Aug. 14, 2020.
Prior Publication US 2022/0049982 A1, Feb. 17, 2022
Int. Cl. G01F 15/00 (2006.01); G01F 25/10 (2022.01); G01F 1/40 (2006.01); G05D 16/20 (2006.01); G01F 15/06 (2022.01)
CPC G01F 15/005 (2013.01) [G01F 1/40 (2013.01); G01F 15/06 (2013.01); G01F 25/10 (2022.01); G05D 16/2013 (2013.01)] 20 Claims
OG exemplary drawing
 
1. A rate-of-change flow measurement device comprising:
a block body having a flow path;
a chamber comprising a part of the flow path of the block body;
a position control valve comprising an actuator;
a valve position sensor configured to measure a valve position of the actuator of the position control valve;
a first pressure sensor located on a first side of the flow path from the position control valve and configured to detect a first pressure at the first side of the flow path;
a second pressure sensor located on a second side of the flow path from the position control valve and configured to detect a second pressure at the second side of the flow path adjacent the chamber; and
a processor configured to:
receive valve position data from the valve position sensor indicating the valve position of the actuator;
receive, from the first pressure sensor, first pressure data;
receive, from the second pressure sensor, second pressure data; and
calculating a volume of the chamber at least in part using the valve position data when a calibration of a device-under-test is performed by decreasing a pressure of the chamber or increasing the pressure of the chamber while opening the position control valve to maintain the first pressure constant to stay at a pressure set point.