US 11,859,305 B2
Apparatus for growing a SiC single crystal ingot comprising a filter unit having a porous body surrounding an opening unit that is located under a seed crystal
Jung Woo Choi, Gyeonggi-do (KR); Jung-Gyu Kim, Gyeonggi-do (KR); Kap-Ryeol Ku, Gyeonggi-do (KR); Sang Ki Ko, Gyeonggi-do (KR); and Byung Kyu Jang, Gyeonggi-do (KR)
Assigned to SENIC Inc., Chungcheongnam-do (KR)
Filed by SENIC Inc., Chungcheongnam-do (KR)
Filed on Feb. 16, 2023, as Appl. No. 18/169,883.
Application 18/169,883 is a division of application No. 17/268,189, previously published as PCT/KR2019/009314, filed on Jul. 26, 2019.
Claims priority of application No. 10-2018-0102806 (KR), filed on Aug. 30, 2018; application No. 10-2018-0102822 (KR), filed on Aug. 30, 2018; and application No. 10-2018-0106272 (KR), filed on Sep. 6, 2018.
Prior Publication US 2023/0193506 A1, Jun. 22, 2023
Int. Cl. C30B 35/00 (2006.01); C30B 23/00 (2006.01); C30B 23/02 (2006.01); C30B 29/36 (2006.01)
CPC C30B 23/005 (2013.01) [C30B 23/02 (2013.01); C30B 29/36 (2013.01)] 9 Claims
OG exemplary drawing
 
1. An apparatus for growing a SiC single crystal ingot, which comprises:
a seed crystal having a predetermined diameter; and
a reaction vessel for growing an ingot on a surface of the seed crystal while the seed crystal is fixed therein,
wherein the reaction vessel comprises:
an ingot growing unit that forms at least a part of an upper region of the reaction vessel and that fixes the seed crystal at an upper end,
a filter unit that comprises an opening unit forming an inner center and a porous body surrounding the opening unit and that forms at least a part of a lower region of the reaction vessel while being located under the seed crystal,
a raw material receiving unit that is located between the porous body and an inner wall of the reaction vessel, that forms at least a part of the lower region of the reaction vessel, and that receives a raw material of the ingot therein; and
a blocking unit that is positioned at the upper end of the raw material receiving unit and at the upper end of the porous body,
wherein the porous body is prepared from a SiC composition comprising a carbon- containing polymer resin, SiC, a dopant, and a solvent.