CPC C23C 28/345 (2013.01) [C23C 28/32 (2013.01); H01J 37/32477 (2013.01)] | 12 Claims |
1. A corrosion-resistant member comprising:
a metal base material;
a corrosion-resistant coating formed on a surface of the base material; and
a buffer layer formed between the base material and the corrosion-resistant coating, wherein
the base material contains a main element which is an element having a highest mass content ratio among elements contained in the base material and a trace element which is an element having a mass content ratio of 1% by mass or less,
the corrosion-resistant coating contains at least one kind selected from magnesium fluoride, aluminum fluoride, and aluminum oxide, and
the buffer layer contains an element of a same kind as the trace element, and a content ratio obtained by energy dispersive X-ray analysis of the element of the same kind as the trace element contained in the buffer layer is 2% by mass or more and 99% by mass or less,
wherein the buffer layer includes chromium, nickel, iron, and copper.
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