US 11,859,288 B2
Corrosion-resistant member
So Miyaishi, Tokyo (JP); Masahiro Okubo, Tokyo (JP); Masayuki Yoshimura, Tokyo (JP); Wataru Sakane, Tokyo (JP); Teppei Tanaka, Tokyo (JP); Saeko Nakamura, Tokyo (JP); and Saori Yamaki, Tokyo (JP)
Assigned to Resonac Corporation, Tokyo (JP)
Appl. No. 17/611,768
Filed by SHOWA DENKO K.K., Tokyo (JP)
PCT Filed Sep. 3, 2020, PCT No. PCT/JP2020/033462
§ 371(c)(1), (2) Date Nov. 16, 2021,
PCT Pub. No. WO2021/070529, PCT Pub. Date Apr. 15, 2021.
Claims priority of application No. 2019-184781 (JP), filed on Oct. 7, 2019.
Prior Publication US 2022/0251699 A1, Aug. 11, 2022
Int. Cl. C23C 28/00 (2006.01); H01J 37/32 (2006.01)
CPC C23C 28/345 (2013.01) [C23C 28/32 (2013.01); H01J 37/32477 (2013.01)] 12 Claims
OG exemplary drawing
 
1. A corrosion-resistant member comprising:
a metal base material;
a corrosion-resistant coating formed on a surface of the base material; and
a buffer layer formed between the base material and the corrosion-resistant coating, wherein
the base material contains a main element which is an element having a highest mass content ratio among elements contained in the base material and a trace element which is an element having a mass content ratio of 1% by mass or less,
the corrosion-resistant coating contains at least one kind selected from magnesium fluoride, aluminum fluoride, and aluminum oxide, and
the buffer layer contains an element of a same kind as the trace element, and a content ratio obtained by energy dispersive X-ray analysis of the element of the same kind as the trace element contained in the buffer layer is 2% by mass or more and 99% by mass or less,
wherein the buffer layer includes chromium, nickel, iron, and copper.