US 11,859,285 B2
Processing apparatus and processing method
Hiroki Iriuda, Yamanashi (JP); and Kuniyasu Sakashita, Yamanashi (JP)
Assigned to TOKYO ELECTRON LIMITED, Tokyo (JP)
Filed by Tokyo Electron Limited, Tokyo (JP)
Filed on Sep. 13, 2021, as Appl. No. 17/472,920.
Claims priority of application No. 2020-156408 (JP), filed on Sep. 17, 2020.
Prior Publication US 2022/0081773 A1, Mar. 17, 2022
Int. Cl. C23C 16/455 (2006.01); H01L 21/02 (2006.01); C23C 16/52 (2006.01)
CPC C23C 16/45578 (2013.01) [C23C 16/45546 (2013.01); C23C 16/52 (2013.01); H01L 21/0228 (2013.01)] 19 Claims
OG exemplary drawing
 
1. A processing apparatus comprising:
a processing container having a substantially cylindrical shape including an inner tube and an outer tube that are coaxially arranged with a space therebetween;
a processing gas nozzle extending in a longitudinal direction of the processing container along an inside of a side wall of the inner tube of the processing container;
an exhaust body formed on the side wall of the inner tube on an opposite side of the inner tube of the processing container to face the processing gas nozzle; and
an adjustment gas nozzle provided within the exhaust body and configured to eject a concentration adjustment gas toward a center of the processing container,
wherein the adjustment gas nozzle is provided within an angle range in which the exhaust body is formed, at a central angle with reference to the center of the processing container when viewed from a top,
the exhaust body includes a protruding portion formed on a portion of the side wall of the inner tube of the processing container toward an outside, and an exhaust slit formed at a tip of the protruding portion and communicating an inside of the inner tube and the space, and
the exhaust body is formed within a range of the central angle of 150° to 180°.