US 11,859,282 B2
Manifold valve for controlling multiple gases
Damodar Rajaram Shanbhag, Beaverton, OR (US); and Nagraj Shankar, Tualatin, OR (US)
Assigned to Lam Research Corporation, Fremont, CA (US)
Filed by Lam Research Corporation, Fremont, CA (US)
Filed on Jul. 26, 2022, as Appl. No. 17/874,188.
Application 17/874,188 is a continuation of application No. 16/966,831, granted, now 11,427,908, previously published as PCT/US2019/015799, filed on Jan. 30, 2019.
Claims priority of provisional application 62/624,710, filed on Jan. 31, 2018.
Prior Publication US 2022/0372619 A1, Nov. 24, 2022
Int. Cl. H01J 37/32 (2006.01); C23C 16/455 (2006.01); C23C 16/52 (2006.01); F16K 27/00 (2006.01)
CPC C23C 16/455 (2013.01) [C23C 16/52 (2013.01); F16K 27/003 (2013.01); H01J 37/3244 (2013.01); H01J 37/32431 (2013.01)] 16 Claims
OG exemplary drawing
 
1. A point-of-use (POU)-valve manifold to control admission of a plurality of gases into a tool, the POU-valve manifold comprising:
a manifold body configured to couple to a chamber of the tool; and
for each of the plurality of gases, the POU-valve manifold further includes:
a gas valve coupled to the manifold body and configured to be coupled to a gas supply, the gas valve having a separate gas flow path internal to and separated from remaining ones of the gas flow paths within the manifold body with the gases only able to meet at a common outlet of the POU-valve manifold to prevent any of the plurality of gases to be mixed within flow paths of the POU-valve manifold; and
an annulus to at least partially surround the common outlet of the POU-valve manifold.