US 11,859,119 B2
Chemical liquid and method for treating object to be treated
Tomonori Takahashi, Shizuoka (JP); and Yasuo Sugishima, Shizuoka (JP)
Assigned to FUJIFILM Corporation, Tokyo (JP)
Filed by FUJIFILM Corporation, Tokyo (JP)
Filed on Sep. 17, 2021, as Appl. No. 17/477,554.
Application 17/477,554 is a continuation of application No. PCT/JP2020/009076, filed on Mar. 4, 2020.
Claims priority of application No. 2019-062243 (JP), filed on Mar. 28, 2019.
Prior Publication US 2022/0002622 A1, Jan. 6, 2022
Int. Cl. C09K 13/00 (2006.01); B08B 3/08 (2006.01); C23F 1/34 (2006.01); C23F 1/36 (2006.01); C23F 1/38 (2006.01); C23F 1/40 (2006.01); H01L 21/02 (2006.01); H01L 21/3213 (2006.01)
CPC C09K 13/00 (2013.01) [B08B 3/08 (2013.01); C23F 1/34 (2013.01); C23F 1/36 (2013.01); C23F 1/38 (2013.01); C23F 1/40 (2013.01); H01L 21/02071 (2013.01); H01L 21/32134 (2013.01)] 23 Claims
OG exemplary drawing
 
1. A chemical liquid comprising:
water;
a hydroxylamine compound selected from the group consisting of hydroxylamine and a hydroxylamine salt, and
two or more kinds of specific compounds represented by Formula (1),

OG Complex Work Unit Chemistry
in Formula (1), R1 to R3 each independently represent a hydrogen atom or a substituent,
one or two R1, R2, or R3 represents a specific substituent containing —CO—NH—, wherein the —CO— of the —CO—NH— is a carbonyl group,
R1 and R2 may be bonded to each other to form an aromatic ring which may have a substituent, and
in a case where R1 and R2 are bonded to each other to form an aromatic ring which may have a substituent, R3 represents the specific substituent,
in a case where R1 and R2 are not bonded to each other to form an aromatic ring which may have a substituent, one or two of R1 to R3 represent a group represented by Formula (2),
-L2-COOH  (2)
in Formula (2), L2 represents a single bond or a divalent linking group that does not contain —CO—NH—,
wherein the chemical liquid comprises both the hydroxylamine compound and the specific compounds of Formula (1), and
a mass ratio of a content of a specific compound which takes up the highest proportion of the specific compounds to a content of a specific compound which takes up the second highest proportion of the specific compounds is 500 or less.