US 11,858,829 B2
Ternary paraelectric material with space group Cc and method of manufacturing the same
Giyoung Jo, Suwon-si (KR); Chan Kwak, Yongin-si (KR); Hyungjun Kim, Suwon-si (KR); Euncheol Do, Seoul (KR); Hyeoncheol Park, Hwaseong-si (KR); and Changsoo Lee, Seoul (KR)
Assigned to Samsung Electronics Co., Ltd., Gyeonggi-do (KR)
Filed by Samsung Electronics Co., Ltd., Suwon-si (KR)
Filed on Mar. 16, 2020, as Appl. No. 16/819,571.
Claims priority of application No. 10-2019-0132390 (KR), filed on Oct. 23, 2019.
Prior Publication US 2021/0122644 A1, Apr. 29, 2021
Int. Cl. C01G 33/00 (2006.01); C01G 31/00 (2006.01); C01G 35/00 (2006.01); C04B 35/645 (2006.01); H01L 49/02 (2006.01); C04B 35/626 (2006.01); H10B 12/00 (2023.01)
CPC C01G 33/006 (2013.01) [C04B 35/6261 (2013.01); C04B 35/62695 (2013.01); C04B 35/645 (2013.01); H01L 28/40 (2013.01); H10B 12/37 (2023.02); C01P 2002/72 (2013.01); C01P 2002/76 (2013.01); C01P 2006/10 (2013.01); C01P 2006/40 (2013.01)] 20 Claims
OG exemplary drawing
 
1. A ternary paraelectric having a Cc structure comprising:
a material having a chemical formula of A2B4O11 that belongs to a monoclinic system, is a space group No. 9, and has a dielectric constant of 150 to 250,
wherein “A” is a Group 1 element, and “B” is a Group 5 element.