CPC B41J 2/14233 (2013.01) [B41J 2/025 (2013.01); B41J 2/175 (2013.01)] | 21 Claims |
1. A liquid ejection head comprising:
a piezoelectric body;
a vibration plate to be vibrated by a drive of the piezoelectric body; and
a pressure chamber substrate including a pressure chamber which applies a pressure to a liquid by a vibration of the vibration plate,
wherein the pressure chamber substrate, the vibration plate, and the piezoelectric body are laminated in this order, and
the vibration plate includes:
a first layer containing silicon as a constituent element;
a second layer which is disposed between the first layer and the piezoelectric body, and which contains as a constituent element, a metal element selected from chromium, titanium, and aluminum; and
a third layer which is disposed between the second layer and the piezoelectric body, and which contains zirconium as a constituent element,
wherein the second layer has a thickness smaller than that of each of the first layer and the third layer.
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