US 11,858,270 B2
Liquid ejection head, liquid ejection apparatus, piezoelectric device, and method for manufacturing piezoelectric device
Toshihiro Shimizu, Fujimi-Machi (JP); Harunobu Koike, Matsumoto (JP); Takanori Aimono, Matsumoto (JP); Masao Nakayama, Shiojiri (JP); Tatsuo Sawasaki, Fujimi-machi (JP); Chihiro Nishi, Chino (JP); Noritaka Mochizuki, Kofu (JP); Yasushi Yamazaki, Azumino (JP); and Osamu Tonomura, Ebina (JP)
Assigned to Seiko Epson Corporation, Tokyo (JP)
Filed by SEIKO EPSON CORPORATION, Tokyo (JP)
Filed on May 17, 2021, as Appl. No. 17/322,204.
Claims priority of application No. 2020-088044 (JP), filed on May 20, 2020.
Prior Publication US 2021/0362501 A1, Nov. 25, 2021
Int. Cl. B41J 2/14 (2006.01); B41J 2/175 (2006.01); B41J 2/025 (2006.01)
CPC B41J 2/14233 (2013.01) [B41J 2/025 (2013.01); B41J 2/175 (2013.01)] 21 Claims
OG exemplary drawing
 
1. A liquid ejection head comprising:
a piezoelectric body;
a vibration plate to be vibrated by a drive of the piezoelectric body; and
a pressure chamber substrate including a pressure chamber which applies a pressure to a liquid by a vibration of the vibration plate,
wherein the pressure chamber substrate, the vibration plate, and the piezoelectric body are laminated in this order, and
the vibration plate includes:
a first layer containing silicon as a constituent element;
a second layer which is disposed between the first layer and the piezoelectric body, and which contains as a constituent element, a metal element selected from chromium, titanium, and aluminum; and
a third layer which is disposed between the second layer and the piezoelectric body, and which contains zirconium as a constituent element,
wherein the second layer has a thickness smaller than that of each of the first layer and the third layer.