CPC B24B 37/26 (2013.01) [B24B 37/22 (2013.01); B24D 18/0009 (2013.01); B24D 18/0045 (2013.01); B29C 43/021 (2013.01); B29C 43/36 (2013.01); B29C 2043/023 (2013.01); B29C 2043/3634 (2013.01); B29C 2793/009 (2013.01); B29C 2793/0027 (2013.01); B29L 2009/00 (2013.01)] | 6 Claims |
1. A polishing layer having a surface pattern, wherein a cross section of the surface pattern along a direction has a plurality of grooves and a plurality of polishing portions, the direction includes a first direction parallel to an X-axis direction, a second direction parallel to a Y-axis direction, a third direction at an angle with the X-axis direction, a radius direction or a circumferential direction, and each of the grooves is disposed between every two adjacent polishing portions, wherein the polishing layer comprises:
a body layer, wherein the body layer comprises at least one flattened region; and
a surface layer disposed on a surface of the body layer, wherein the surface layer exposes the at least one flattened region of the body layer, wherein the polishing layer has a perfusion flow mark, and the at least one flattened region is located at an end of the perfusion flow mark.
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